Solid-state image pickup element

固体撮像素子およびその製造方法

Abstract

【課題】反射防止効率を向上させて入射光の損失を防止し、光電変換効率の向上を図ることができる固体撮像素子を提供する。 【解決手段】受光部を備えた半導体基板30上に、積層膜3、カラーフィルター19及びマイクロレンズ22を備えた固体撮像素子においてに、半導体基板30上に半導体基板側から順に少なくとも各一層の高屈折率を持つ第1膜3aと低屈折率を持つ第2膜3bが隣接配置されている。 【選択図】 図3
<P>PROBLEM TO BE SOLVED: To provide a solid-state image pickup element which reduces loss of incident light by improving antireflection efficiency and enhances photoelectric conversion efficiency. <P>SOLUTION: The solid-state image pickup element equipped with a film stack 3, a color filter 19, and a microlens 22 on a semiconductor substrate 30 equipped with a light receiving section, comprises a first film 3a with a high refractive index and a second film 3b with a low refractive index adjacently arranged on the semiconductor substrate 30 in this order viewing from the semiconductor substrate side, each of which has at least one layer. <P>COPYRIGHT: (C)2008,JPO&INPIT

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